מוצרים

Reticle and Box Storage Handling Systems- Refurbished/ upgraded / custom modified


 

 Mono POD XCDA/N2 Purged Reticle and Box Storage Handling Systems


Direct Purge Reticle Stocker. It's designed for use with XCDA/N2 as a high-volume storage device for variety of reticle pods. A continuous flow of XCDA at each pod position ensures haze protection. Can be supplied with RFID or BCR,  can be used for 248 nm and 193 nm photolithography – Full support package: Design, custom engineering, manufacturing, install,

Service and spares supply

200mm Aero Track Handling Systems-  Refurbished/ upgraded / custom modified

Various systems like 100/200/300 mono rail systems, all types NT, DOS ..,New designed Aero track smart Vehicles carry variety of loads: reticles , box, FOUPs, FOSB  and more,  Obtain all relevant components to support complete or partial systems requirements– Full support package: Design, custom engineering, manufacturing, install, Service and spares supply