מוצרים
Reticle and Box Storage Handling Systems- Refurbished/ upgraded / custom modified
Mono POD XCDA/N2 Purged Reticle and Box Storage Handling Systems
Direct Purge Reticle Stocker. It's designed for use with XCDA/N2 as a high-volume storage device for variety of reticle pods. A continuous flow of XCDA at each pod position ensures haze protection. Can be supplied with RFID or BCR, can be used for 248 nm and 193 nm photolithography – Full support package: Design, custom engineering, manufacturing, install,
Service and spares supply
200mm Aero Track Handling Systems- Refurbished/ upgraded / custom modified
Various systems like 100/200/300 mono rail systems, all types NT, DOS ..,New designed Aero track smart Vehicles carry variety of loads: reticles , box, FOUPs, FOSB and more, Obtain all relevant components to support complete or partial systems requirements– Full support package: Design, custom engineering, manufacturing, install, Service and spares supply